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Memories of NFF:
A Place of Fulfillment, Growth and Friendship

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I remember coming here thirty some years ago. There was no Microelectronics Fabrication Center (MFC), the predecessor of the Nanosystem Fabrication Facility (NFF). Life felt empty. There would be neither research nor teaching. Non-existence before the Big Bang, meaningless. 

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Prof. Man WONG
Professor, Department of Electronic and Computer Engineering

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Issue 6 | Dec 2023

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Prof. Man WONG
Professor, Department of Electronic and Computer Engineering
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Memories of NFF: A Place of Fulfillment, Growth and Friendship

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I remember coming here thirty some years ago. There was no Microelectronics Fabrication Center (MFC), the predecessor of the Nanosystem Fabrication Facility (NFF). Life felt empty. There would be neither research nor teaching. Non-existence before the Big Bang, meaningless. 

 

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The Naming Ceremony of Dr Tai-chin Lo Nanosystem Fabrication Facility

To recognize the donation made by Dr. Tai-chin LO and her husband Dr. Tony TAI, in support of the University's research development, a naming ceremony was held on December 5th for the Dr Tai-chin Lo Nanosystem Fabrication Facility. 

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A Journey of Dedication and Achievement: Mr. Wing Leong CHUNG's 30 Years with NFF(CWB)

In October 1991, Mr. Wing Leong CHUNG (阿鍾) embarked on a journey that would last over three decades. He joined the Microelectronics Fabrication Center (MFC), the precursor of NFF, as one of the earliest members. At the young age of 25, Mr. CHUNG poured his heart and soul into the facility and became an integral part of its growth and success.

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New Equipment and Process Capabilities

NFF(CWB) has been awarded REC funding for the 2022/23 fiscal year to acquire a new Oxford Plasma Pro 100 ICP-RIE system. This system will fulfill the increasing demand for high-quality, non-standard Silicon Oxide and Silicon Nitride etching processes in NFF(CWB). The system offers excellent etching rates and uniformity across a wide range of applications, and it is scheduled to be delivered to HKUST in 2024.

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New Equipment under Service

A new wafer bonder was installed and became operational in NFF(CWB) Phase 2 lab in April 2023. It provides additional process capability on adhesive, eutectic, anodic substrate bonding and silicon fusion pre-bonding.

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New NFF(CWB) Promotion Video

We are excited to announce the release of our first-ever promotional video for the NFF(CWB). This video provides an overview of our state-of-the-art facilities, as well as the services and support we offer to researchers and industry partners. Whether you are a new user or a long-time collaborator, we invite you to take a few minutes to watch the video and learn more about what we can offer you. You can access the video through this link and we hope you enjoy it.

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New NFF(CWB) Equipment Booking System

NFF(CWB) is currently collaborating with ISO to develop a new equipment booking system to enhance the lab management of NFF(CWB). This new system is designed to replace the old system which has been in use for many years. The system is planned to be launched in the first quarter of 2024.

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Graduated NFF(CWB) users in 2021-2022

The NFF(CWB) congratulates the 46 NFF(CWB) users who graduated in 2021-2022:

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Graduated NFF(CWB) users in 2021-2022

The NFF(CWB) congratulates the 46 NFF(CWB) users who graduated in 2021-2022:

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Publication Highlights

NFF(CWB) user Ying XUE’s paper, titled “In-Plane 1.5 µm Distributed Feedback Lasers Selectively Grown on (001) SOI” was published in the Laser & Photonics Reviews in August 2023. Ying XUE is supervised by Prof. Kei May LAU.

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Events and Activities

Following the cancellation of social distancing measures and the lifting of mandatory mask-wearing requirements, effective March 1st, the NFF(CWB) has resumed full normal operations, including organizing various lab visits and lab sessions.

From March 1st until October 31st, the NFF(CWB) had served more than 360 visitors who came to the facility for visits. Additionally, the NFF(CWB) was open for the University's open day, as well as several undergraduate and postgraduate course lab sessions.

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The NFF(CWB) Team

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Victor had experience working with plating processes in the industrial sector. In addition, he was a skilled software engineer who had successfully deployed an automation control system for an RIE etcher.

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Olive studied Chemistry as her major and had gained a lot of internship experience working in testing laboratory companies.

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The NFF(CWB) team would like to extend our sincere appreciation to Mr. Yigong CHEN for his retirement after many years of service.